Ultrahigh Accurate 3-D Profilometer
Japanese / English
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『3D form measurement case』
Here is actual measurement result by using UA3P.
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Wafer level lens measurement
Wafer level lenses can be continuously measured to evaluate their shape.
Applicable model
UA3P-500H/650H/700H
Corresponding option
Wafer chuck and camera unit
Assist Function for Wafer Lens Measurement