Ultrahigh
Accurate 3-D Profilometer
Japanese / English
Ultrahigh Accurate 3-D Profilometer
We realize large area and high speed measurement by using air bearing stage and XY linear motor driving.
A series of UA3P-1000 is higher accuracy at high angle than ever.
UA3P can correspond to evaluate WLL process.
UA3P can evaluate the decenter and tilt between both lens surface.
UA3P-Home
About UA3P
3D form measurement case
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UA3P movies on YouTube